On the Scientific Application of Atomic Force Microscope in Laboratory

Atomic force microscopes can detect many samples and provide data for surface research and production control or process development, which are not provided by conventional scanning surface roughness meters and electron microscopes.

Atomic force microscope is a scanning probe microscope developed from the basic principles of scanning tunneling microscope. The emergence of atomic force microscope has undoubtedly promoted the development of nanotechnology. A scanning probe microscope represented by an atomic force microscope uses a small probe in the sample

A series of microscopes that scan on the surface of the product to provide high-magnification observation. Atomic force microscope scanning can provide information on the surface status of various types of samples. Compared with conventional microscopes, the advantage of atomic force microscopes is to observe samples at high magnification under atmospheric conditions

The surface can be used for almost all samples (there is a certain requirement for the surface finish), without the need for other sample preparation processing, you can get a three-dimensional image of the sample surface. Roughness calculation, thickness, step width, block diagram or particle size analysis can be performed on the scanned three-dimensional topography image.

1. Basic principles

Atomic force microscope is to measure the surface morphology by detecting the interaction force (atomic force) between the sample surface and the fine probe tip.

The probe tip is on a small cantilever. When the probe touches the surface of the sample, the interaction is detected in the form of cantilever deflection. The distance between the sample surface and the probe is less than 3-4nm, and the force detected between them is less than 10-8N.

The light from the laser diode is focused on the back of the cantilever. When the cantilever bends under the action of force, the reflected light deflects, using a position-sensitive photodetector to deflect the angle. Then, the collected data is processed by a computer to obtain a three-dimensional image of the sample surface.

The complete cantilever probe is placed on the surface of the sample controlled by the piezoelectric scanner and scanned in three directions with a precision level of 0.1 nm or less. In general, when sweeping on the surface of the sample in detail (XY axis), the Z axis of the cantilever's displacement feedback control is kept fixed. The Z-axis value that is feedback to the scan response is input into the computer for processing, and an observation image (3D image) of the sample surface is obtained.

2. Features of Atomic Force Microscope

1. High resolution capability far exceeds that of scanning electron microscope (SEM) and optical roughness meter. The three-dimensional data on the surface of the sample satisfies the increasingly microscopic requirements of research, production and quality inspection.

2. Non-destructive, the interaction force between the probe and the sample surface is 10-8N or less, which is far less than the pressure of the conventional stylus roughness meter, so it will not damage the sample and there is no electron beam damage problem of the scanning electron microscope. In addition, scanning electron microscopy requires coating of non-conductive samples, which is not required for atomic force microscopy.

3. Wide range of applications, can be used for surface observation, size measurement, surface roughness measurement, particle size analysis, statistical processing of protrusions and pits, film formation condition evaluation, protective layer size step measurement, interlayer insulating film flatness evaluation , Evaluation of VCD coating, evaluation of the friction treatment process of oriented film, defect analysis, etc.

4. The software has strong processing functions, and its three-dimensional image display size, viewing angle, display color, and gloss can be set freely. And can choose network, contour line, line display. Image processing macro management, cross-sectional shape and roughness analysis, shape analysis and other functions.

3. Application Examples

1. Applied to paper quality inspection.

2. Applied to the surface morphology analysis of ceramic membrane.

3. Evaluation of nano-scale surface morphology of materials

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